- Series XGT slit valve is suitable for the partition valve between the load lock chamber and the transfer chamber, and between the transfer chamber and the process chamber in semiconductor manufacturing equipment, etc.
Key features
- Gasket with wiper: protection of bellows
- Rubber cushions for opening and closing: impact absorption
- End lock mechanism
- Service life of two million cycles
Specifications
- Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm)
- Valve Type: 1 (Non-Cassette Type)
- Opening Window Size: 46236 (46x236, Applicable Wafer Size 200mm)
- Gate O-ring Material: 1 (FKM)
- Auto Switch & Connector: F (2 pcs D-A93 w/D-sub Connector)
Additional information
- Part number: XGT221-46236-1F
Documents
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