- High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
Key features
- Single acting, Bellows seal.
- Aluminium bodied.
- Uniform baking temperature.
- Minimal outgassing.
- High corrosion resistance to fluorine gas.
- Lightweight, Compact.
- Minimal contamination from heavy metals.
Specifications
- Flange Size: 25
- Flange Type: None [KF(NW)]
- Indicator/Pilot port direction: G (w/Indicator, Rear Flange Surface)
- Temperature/Heater: 5 to 60°C
- Auto Switch: M9// (w/o Auto Switch w/Built-in Magnet)
- Lead Wire Length: 05 M (Or None in the Case of No Auto Switch)
- Number of Autoswitches/Mounting position: None
- Body Surface Treatment: External
- Seal Material: FKM (1349-80)
- Seal Replacement (Refer to PDF on page 4): None
Additional information
- Part number: XLA-25G-2M9//
- Lead time (days): 5
- Minimum order quantity: 1
- Country of origin: JP
- TARIC code: 8481807990
Documents
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