{"product_id":"xgt223-46236-1f","title":"XGT, High Vacuum Slit Valve – XGT223-46236-1F","description":"\u003cul\u003e\n\u003cli\u003eSeries XGT slit valve is suitable for the partition valve between the load lock chamber and the transfer chamber, and between the transfer chamber and the process chamber in semiconductor manufacturing equipment, etc.\u003c\/li\u003e\n\u003c\/ul\u003e\u003ch4\u003eKey features\u003c\/h4\u003e\u003cul\u003e\n\u003cli\u003eGasket with wiper: protection of bellows\u003c\/li\u003e\n\u003cli\u003eRubber cushions for opening and closing:  impact absorption\u003c\/li\u003e\n\u003cli\u003eEnd lock mechanism\u003c\/li\u003e\n\u003cli\u003eService life of two million cycles\u003c\/li\u003e\n\u003c\/ul\u003e\u003ch4\u003eSpecifications\u003c\/h4\u003e\u003cul\u003e\n\u003cli\u003eValve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm)\u003c\/li\u003e\n\u003cli\u003eValve Type: 3 (Cassette Type Half MESK)\u003c\/li\u003e\n\u003cli\u003eOpening Window Size: 46236 (46x236, Applicable Wafer Size 200mm)\u003c\/li\u003e\n\u003cli\u003eGate O-ring Material: 1 (FKM)\u003c\/li\u003e\n\u003cli\u003eAuto Switch \u0026amp; Connector: F (2 pcs D-A93 w\/D-sub Connector)\u003c\/li\u003e\n\u003c\/ul\u003e\u003ch4\u003eAdditional information\u003c\/h4\u003e\u003cul\u003e\n\u003cli\u003ePart number: XGT223-46236-1F\u003c\/li\u003e\n\u003cli\u003eLead time (days): 23\u003c\/li\u003e\n\u003c\/ul\u003e\u003ch4\u003eDocuments\u003c\/h4\u003e\u003cul\u003e\n\u003cli\u003e\u003ca href=\"https:\/\/content2.smcetech.com\/pdf\/XGT_EU.pdf\"\u003eCatalogue (PDF)\u003c\/a\u003e\u003c\/li\u003e\n\u003cli\u003e\u003ca href=\"https:\/\/www.smc.eu\/direct-cad?partNumber=XGT223-46236-1F\u0026amp;format=STEP-214\"\u003eCAD model\u003c\/a\u003e\u003c\/li\u003e\n\u003c\/ul\u003e","brand":"SMC","offers":[{"title":"Default Title","offer_id":67762316476806,"sku":"XGT223-46236-1F","price":11988.06,"currency_code":"EUR","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/1115\/3811\/0854\/files\/8475.jpg?v=1792672116","url":"https:\/\/www.tekisindustry.com\/products\/xgt223-46236-1f","provider":"TEKIS Industry Solution – SMC Pneumatic Components","version":"1.0","type":"link"}